A Comprehensive Study of Semiconductor Defect Detection in SEM Images Using SEMI-PointRend

Time Stamp: March 11, 2023 12:21 AM
Source Node: 2512415

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Semiconductor defect detection is a critical process in the production of integrated circuits. It is important to detect any defects in the manufacturing process to ensure that the final product is of high quality and meets the required standards. The use of scanning electron microscopy (SEM) images to detect defects has become increasingly popular due to its ability to provide detailed images of the surface of the semiconductor. However, traditional SEM image analysis techniques are limited in their ability to accurately detect defects.

Recently, a new technique called SEMI-PointRendering has been developed to improve the accuracy of defect detection in SEM images. This technique uses a combination of image processing and machine learning algorithms to detect and classify defects in SEM images. The technique first uses image processing algorithms to segment the SEM image into regions of interest. Then, a machine learning algorithm is used to classify the regions of interest into different types of defects. Finally, a post-processing step is used to refine the results and improve the accuracy of the defect detection.

The advantages of using SEMI-PointRendering for defect detection include improved accuracy, faster processing time, and reduced cost. Compared to traditional SEM image analysis techniques, SEMI-PointRendering can detect more types of defects with higher accuracy. Additionally, the technique can process images faster than traditional methods, which reduces the cost of defect detection.

In order to evaluate the performance of SEMI-PointRendering for defect detection, a comprehensive study was conducted using a dataset of SEM images from a variety of semiconductor devices. The results showed that SEMI-PointRendering was able to detect more types of defects with higher accuracy than traditional methods. Furthermore, the technique was able to process images faster than traditional methods, which reduced the cost of defect detection.

Overall, SEMI-PointRendering is a promising technique for semiconductor defect detection in SEM images. The technique provides improved accuracy, faster processing time, and reduced cost compared to traditional methods. As such, it is an attractive option for semiconductor manufacturers who are looking for an efficient and cost-effective way to detect defects in their products.